Substrate bias voltage generating and regulating apparatus
US5003197A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 19, 1989 |
| Grant date | Mar 26, 1991 |
| Priority date | — |
| Expiry date | Jan 19, 2009 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03K3/354
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An apparatus for generating and regulating a substrate bias voltage for use in semiconductor devices. The invention comprises a sensor which is responsive to the substrate bias voltage, and generates a continuously variable regulating voltage and a continuously variable oscillator bias voltage. A variable impedance device whose resistance is adjustable over a range of values as a function of said regulating voltage is coupled to a charge pump to control the amount of charge pumped by said charge pump per unit time from the substrate of the semiconductor device. An oscillator whose frequency is continuously controlled by the oscillator bias voltage from the sensor is coupled to said charge pump so as to further control the amount of charge pumped by said charge pump per unit time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.