Displacement controller for fine positioning device
US5005298A · kind A · utility
12Cited by
4References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 14, 1988 |
| Grant date | Apr 9, 1991 |
| Priority date | — |
| Expiry date | Sep 14, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/41352
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A controller for a fine positioning device constructed of planar structural units connected symmetrically and equipped individually with planar flexible beams arranged in an opposing relation between two rigid members and actuators for applying forces between the two rigid members includes displacement detection devices, displacement setting devices, sensor devices for determining the degree of each translational displacement and the degree of each angular displacement, and control devices for controlling the voltages to be applied to the respective actuators.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.