Composite apparatus with secondary ion mass spectrometry instrument and scanning electron microscope
US5008537A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Sep 20, 1989 |
| Grant date | Apr 16, 1991 |
| Priority date | — |
| Expiry date | Sep 20, 2009 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/256
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A composite apparatus is disclosed which includes in combination a secondary ion mass spectrometry instrument and a scanning electron microscope. A liquid metal ion source and an ion source other than the liquid metal ion source are installed in the same apparatus so that an ion beam emitted from the liquid metal ion source and an ion beam emitted from the ion source other than the liquid metal ion source are aligned with each other on a primary beam axis which is an optical axis of an irradiating system. The liquid metal ion source is disposed in rear of a primary ion separating device which mass-separates the ion beam emitted from the ion source other than the liquid metal ion source. Further, an electron gun is installed in the same apparatus so that an electron beam emitted from the electron gun is aligned with the ion beam on the primary beam axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.