Catadioptric imaging system
US5031976A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Sep 24, 1990 |
| Grant date | Jul 16, 1991 |
| Priority date | — |
| Expiry date | Sep 24, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/90
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An improved catadioptric imaging system is presented which produces a flat accessible final image, and is particularly effective at high speed in the deep ultraviolet spectral range. The lenses of the system are formed from a single glass type, fused silica. A first group of lenses serves as an aberration corrector group. A single focusing lens focuses light, transmitted through the corrector group, forming an intermediate image at a predetermined position within the system. A separate field lens is placed at the intermediate image point, and focuses the light transmitted thereto through a hole in the center of a spherical mirror. The light then travels through a separate thick lens element and is subsequently reflected by a planar mirror back through the thick lens and towards the concave reflective side of the spherical mirror. The spherical mirror thereafter reflects this incident light, focusing it through a hole in the center of the planar mirror and to a final imaging point outside of the system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.