Inventor · Fairfield, CT, US

David Shafer

134Patents
31h-index
66Co-inventors
93Inventor score

Filing activity: Aug 18, 1977 → Sep 30, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US5999310A Ultra-broadband UV microscope imaging system with wide range zoom capability Physics 159 Expired
US5717518A Broad spectrum ultraviolet catadioptric imaging system Physics 146 Expired
US5686728A Projection lithography system and method using all-reflective optical elements Physics 117 Expired
US4747678A Optical relay system with magnification Physics 93 Expired
US6636350B2 Microlithographic reduction projection catadioptric objective Physics 91 Expired
US5031976A Catadioptric imaging system Emerging Cross-Sectional Technologies 86 Expired
US5559338A Deep ultraviolet optical imaging system for microlithography and/or microfabrication Physics 83 Expired
US6142641A Four-mirror extreme ultraviolet (EUV) lithography projection system Physics 83 Expired
US6064517A High NA system for multiple mode imaging Physics 83 Expired
US6600608B1 Catadioptric objective comprising two intermediate images Physics 77 Expired
US5353322A Lens system for X-ray projection lithography camera Physics 74 Expired
US5488229A Deep ultraviolet microlithography system Physics 74 Expired
US6204961A Day and night sighting system Physics 69 Expired
US6188513A High numerical aperture ring field projection system for extreme ultraviolet lithography Physics 61 Expired
US5410434A Reflective projection system comprising four spherical mirrors Physics 60 Expired
US5220590A X-ray projection lithography camera Physics 59 Expired
US4469414A Restrictive off-axis field optical system Physics 58 Expired
US4226501A Four mirror unobscurred anastigmatic telescope with all spherical surfaces Physics 56 Expired
US6873476B2 Microlithographic reduction projection catadioptric objective Physics 56 Expired
US6842298B1 Broad band DUV, VUV long-working distance catadioptric imaging system Physics 51 Expired
US4711535A Ring field projection system Physics 47 Expired
US5973826A Reflective optical imaging system with balanced distortion Physics 47 Expired
US6014252A Reflective optical imaging system Emerging Cross-Sectional Technologies 46 Expired
US7218445B2 Microlithographic reduction projection catadioptric objective Physics 45 Expired
US6262836A High numerical aperture ring field projection system for extreme ultraviolet lithography Physics 42 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.