Multichannel charged-particle analyzer
US5032724A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 9, 1990 |
| Grant date | Jul 16, 1991 |
| Priority date | — |
| Expiry date | Aug 9, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/482
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A charged-particle energy analyzer includes a hollow axisymmetrical body with an annular opening therein receptive of input electrons from a cylindrical mirror analyzer, the electrons having a distribution of electron energies and a range of electron trajectories. The trajectories each have a radially inward directional component and an axial directional component in a forward direction parallel to the axis. Annular deflectors with negative potentials are disposed coaxially in the body so as to reverse the axial directional components of the electron trajectories. A ring-shaped channel detector detects the electrons relative to radial distance and thereby to energy.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.