Ion source method and apparatus
US5034612A · kind A · utility
39Cited by
8References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 3, 1990 |
| Grant date | Jul 23, 1991 |
| Priority date | — |
| Expiry date | Dec 3, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J27/26
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Ion source methods and apparatus include an ion generating element for providing a reservoir of flowing liquid source material, accelerating elements for providing an electric field around the ion generating element, and shielding elements. The shielding element is constructed from a material including atoms which, if backsputtered onto the ion generating element, do not substantially degrade ion source performance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.