Inventor · Merrimac, MA, US

Billy W. Ward

44Patents
20h-index
29Co-inventors
85Inventor score

Filing activity: Sep 8, 1981 → Apr 13, 2015

Most-cited inventions

PatentTitleAreaCited byStatus
US7554096B2 Ion sources, systems and methods Electricity 91 Active
US4639301A Focused ion beam processing Electricity 90 Expired
US4874947A Focused ion beam imaging and process control Electricity 68 Expired
US7554097B2 Ion sources, systems and methods Electricity 67 Active
US7557359B2 Ion sources, systems and methods Electricity 65 Active
US7557358B2 Ion sources, systems and methods Electricity 64 Active
US6039000A Focused particle beam systems and methods using a tilt column Electricity 64 Expired
US7557360B2 Ion sources, systems and methods Electricity 63 Active
US7557361B2 Ion sources, systems and methods Electricity 63 Active
US7786452B2 Ion sources, systems and methods Electricity 58 Active
US7786451B2 Ion sources, systems and methods Electricity 55 Active
US4433384A Pattern data handling system for an electron beam exposure system Electricity 42 Expired
US5034612A Ion source method and apparatus Electricity 39 Expired
US6497194B1 Focused particle beam systems and methods using a tilt column Electricity 35 Expired
US7368727B2 Atomic level ion source and method of manufacture and operation Electricity 34 Expired
US5155368A Ion beam blanking apparatus and method Electricity 26 Expired
US7321118B2 Scanning transmission ion microscope Electricity 23 Expired
US7485873B2 Ion sources, systems and methods Electricity 22 Active
US7414243B2 Transmission ion microscope Electricity 21 Expired
US8110814B2 Ion sources, systems and methods Electricity 20 Active
US7511279B2 Ion sources, systems and methods Electricity 19 Active
US4976843A Particle beam shielding Electricity 19 Expired
US7511280B2 Ion sources, systems and methods Electricity 18 Active
US7521693B2 Ion sources, systems and methods Electricity 17 Active
US7488952B2 Ion sources, systems and methods Electricity 15 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.