Probe unit for an atomic probe microscope
US5041783A · kind A · utility
28Cited by
7References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 5, 1990 |
| Grant date | Aug 20, 1991 |
| Priority date | — |
| Expiry date | Feb 5, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/861
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe unit includes a disk-like substrate made of transparent material, a transparent electrode coated on all over the substrate, and a metal wire whose sharp tip is projected vertically and upwardly from the center of the substrate through the transparent electrode. The metal wire is made of Pt-Ir, which incudes a sharp tip projected from the upper surface of the substrate and a stem embedded in a hole of the electrode and fixed to the electrode and substrate by conductive adhesive.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.