Patent · US Expired

Method for producing amorphous silicon thin film transistor array substrate

US5045485A · kind A · utility

25Cited by
4References
2Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 19, 1989
Grant dateSep 3, 1991
Priority date
Expiry dateJul 19, 2009

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D86/443

Abstract

A method for producing an amorphous silicon thin film transistor array substrate comprising successively coating a gate insulating layer, an amorphous silicon layer and a protective insulating layer on a glass substrate provided with a gate electrode and a gate wiring having a predetermined shape, in such a manner as to not cover the connecting terminal region of the gate wiring. A protective insulating layer is patterned into a predetermined shape. After passing through a predetermined production process to produce an amorphous silicon thin film transistor array, at least a gate wiring and a source wiring are provided. The step of patterning the protective insulating layer comprises covering the connecting terminals of the gate wiring and the exposed region of the glass substrate with a photoresist.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.