Patent · US Expired

Phase discrimination type electrostatic capacity detector

US5049824A · kind A · utility

23Cited by
5References
4Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 5, 1989
Grant dateSep 17, 1991
Priority date
Expiry dateDec 5, 2009

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01D5/2415
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A phase discrimination type electrostatic capacity detector includes an one-side electrode plate composed of a transmitting electrode and a receiving electrode, another-side electrode plate having coupling electrodes and disposed relatively movably with respect to the one-side electrode plate in a confronting relation with the same, a power supply connected to the transmitting electrode, and a detector circuit connected to the receiving electrode. The detector is miniaturized by disposing the transmitting electrode in a second hierarchy layer partitioned by an electrical insulating layer on a substrate and connecting in series the respective transmitting electrode elements of the same phase in a first hierarchy layer through coupling leads. The detector including a pair of receiving electrode elements between which the transmitting element is interposed, is miniaturized by leading out the coupling leads to one side end of the one-side electrode plate through a space between both receiving electrode elements.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.