Method for increasing the batch size of a barrel epitaxial reactor and reactor produced thereby
US5053247A · kind A · utility
452Cited by
10References
23Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 28, 1989 |
| Grant date | Oct 1, 1991 |
| Priority date | — |
| Expiry date | Feb 28, 2009 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B25/105
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The batch capacity of a barrel epitaxial reactor is improved by increasing the reaction chamber size and increasing the length of the radiant heat source so that a uniform temperature is maintained over a larger flat zone in the reaction chamber. Also, forced air flow from the blower of the reactor is distributed so that a positive air flow is maintained along the exterior wall of the reaction chamber and consequently the wall is maintained at a uniform cold temperature relative to the temperature of the reaction chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.