Gary M. Moore
27Patents
17h-index
8Co-inventors
74Inventor score
Filing activity: Feb 8, 1988 → Mar 29, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5444217A | Rapid thermal processing apparatus for processing semiconductor wafers | Electricity | 601 | Expired |
| US5053247A | Method for increasing the batch size of a barrel epitaxial reactor and reactor produced thereby | Chemistry; Metallurgy | 452 | Expired |
| US5820686A | Multi-layer susceptor for rapid thermal process reactors | Chemistry; Metallurgy | 416 | Expired |
| US5683518A | Rapid thermal processing apparatus for processing semiconductor wafers | Electricity | 130 | Expired |
| US5710407A | Rapid thermal processing apparatus for processing semiconductor wafers | Electricity | 71 | Expired |
| US5580388A | Multi-layer susceptor for rapid thermal process reactors | Electricity | 54 | Expired |
| US6310327A | Rapid thermal processing apparatus for processing semiconductor wafers | Electricity | 44 | Expired |
| US5207835A | High capacity epitaxial reactor | Chemistry; Metallurgy | 38 | Expired |
| US5872632A | Cluster tool layer thickness measurement apparatus | Physics | 35 | Expired |
| US6328221A | Method for controlling a gas injector in a semiconductor processing reactor | Chemistry; Metallurgy | 27 | Expired |
| US5802099A | Method for measuring substrate temperature in radiant heated reactors | Physics | 26 | Expired |
| US6347749B1 | Semiconductor processing reactor controllable gas jet assembly | Chemistry; Metallurgy | 26 | Expired |
| US6110289A | Rapid thermal processing barrel reactor for processing substrates | Chemistry; Metallurgy | 24 | Expired |
| US6799603B1 | Gas flow controller system | Emerging Cross-Sectional Technologies | 23 | Expired |
| US6151447A | Rapid thermal processing apparatus for processing semiconductor wafers | Electricity | 19 | Expired |
| US5601107A | Automated process gas supply system for evacuating a process line | Emerging Cross-Sectional Technologies | 18 | Expired |
| US5240024A | Automated process gas supply system for evacuating a process line | Emerging Cross-Sectional Technologies | 18 | Expired |
| US5801961A | Power management system for a semiconductor processing facility | Electricity | 14 | Expired |
| US6169244A | Thermocouple sheath cover | Physics | 13 | Expired |
| US6475284B1 | Gas dispersion head | Chemistry; Metallurgy | 10 | Expired |
| US6163015A | Substrate support element | Electricity | 8 | Expired |
| US5417236A | Automated process gas supply system for evacuating a process line | Emerging Cross-Sectional Technologies | 7 | Expired |
| US7794667B2 | Gas ring and method of processing substrates | Chemistry; Metallurgy | 6 | Active |
| US4823654A | Wafer handling tool and method of use | Emerging Cross-Sectional Technologies | 6 | Expired |
| US8610033B1 | Rapid thermal process reactor utilizing a low profile dome | Electricity | 3 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.