Triode plasma reactor with phase modulated plasma control
US5057185A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 27, 1990 |
| Grant date | Oct 15, 1991 |
| Priority date | — |
| Expiry date | Sep 27, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32779
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A triode plasma reactor having first, second and third electrodes for forming a plasma in a reaction chamber from a reactant gas includes a phase modulated potential generator for generating time varying potentials on the second and third electrodes which are phase modulated versions of one another. The phase modulated versions may also include a fixed phase shift between them. By time varying the phase angle relative to a set phase shift, a new dimension of time varying control for the reactor may be obtained. Phase modulation at frequencies from audio frequencies to radio frequencies may be provided. Phase modulation may be accomplished digitally or in the analogue domain.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.