Consortium for Surface Processing, Inc.
5Patents
0Active
5Granted
28Portfolio score
Filing activity: Jan 5, 1989 → Dec 23, 1991
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5057185A | Triode plasma reactor with phase modulated plasma control | Electricity | 77 | Expired |
| US5111111A | Method and apparatus for coupling a microwave source in an electron cyclotron resonance system | Electricity | 69 | Expired |
| US5267019A | Method and apparatus for reducing fringe interference in laser spectroscopy | Physics | 41 | Expired |
| US5302803A | Apparatus and method for uniform microwave plasma processing using TE.sub.1 1 .sub.01 modes | Electricity | 21 | Expired |
| US5130295A | Passivating thin film for superconducting material | Emerging Cross-Sectional Technologies | 4 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.