Method for making polyimide microlithographic compositions soluble in alkaline media
US5057399A · kind A · utility
28Cited by
4References
16Claims
0Family size
Inventors
Key dates
| Filing date | Mar 31, 1989 |
| Grant date | Oct 15, 1991 |
| Priority date | — |
| Expiry date | Mar 31, 2009 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC08L63/00
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
Nonamic acidic functionalized diamines and dianhydrides are condensed to produce abnormal acid functionalized polyamic acid/imide resins which surprisingly afford effective lift-off, by alkaline media, even after higher imidization.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.