Inventor · Rolla, MO, US

James E. Lamb, III

24Patents
10h-index
27Co-inventors
75Inventor score

Filing activity: Jan 12, 1987 → Apr 18, 2013

Most-cited inventions

PatentTitleAreaCited byStatus
US6716767B2 Contact planarization materials that generate no volatile byproducts or residue during curing Electricity 56 Expired
US5281690A Base-soluble polyimide release layers for use in microlithographic processing Chemistry; Metallurgy 54 Expired
US4876165A Light filters for microelectronics Electricity 44 Expired
US7026237B2 Fill material for dual damascene processes Emerging Cross-Sectional Technologies 36 Expired
US5234990A Polymers with intrinsic light-absorbing properties for anti-reflective coating applications in deep ultraviolet microlithography Chemistry; Metallurgy 36 Expired
US5362608A Microlithographic substrate cleaning and compositions therefor Physics 32 Expired
US5057399A Method for making polyimide microlithographic compositions soluble in alkaline media Chemistry; Metallurgy 28 Expired
US6391472B1 Fill material for dual damascene processes Emerging Cross-Sectional Technologies 27 Expired
US5401613A Method of manufacturing microelectronic devices having multifunctional photolithographic layers Physics 22 Expired
US5110697A Multifunctional photolithographic compositions Physics 20 Expired
US5368989A Photolithographic article utilizing polymers with light-absorbing properties for anti-reflective coating Physics 10 Expired
US5578676A Method for making polymers with intrinsic light-absorbing properties Physics 9 Expired
US5140666A Heating apparatus for expanding a cylindrical wall using heated air Emerging Cross-Sectional Technologies 7 Expired
US7449230B2 Lithography pattern shrink process and articles Emerging Cross-Sectional Technologies 7 Expired
US7455955B2 Planarization method for multi-layer lithography processing Emerging Cross-Sectional Technologies 7 Expired
US7790231B2 Automated process and apparatus for planarization of topographical surfaces Electricity 6 Active
US7122296B2 Lithography pattern shrink process and articles Emerging Cross-Sectional Technologies 4 Expired
US6670425B2 Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide rings Emerging Cross-Sectional Technologies 4 Expired
US6893684B2 Anti-reflective coating compositions for use with low k dielectric materials Chemistry; Metallurgy 2 Expired
US9642258B2 All-organic inductor-capacitor tank circuit for radio frequency sensor applications Electricity 1 Active
US9960038B2 Processes to pattern small features for advanced patterning needs Emerging Cross-Sectional Technologies 1 Active
US6663916B2 Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide rings Emerging Cross-Sectional Technologies 1 Expired
US8877430B2 Methods of producing structures using a developer-soluble layer with multilayer technology Emerging Cross-Sectional Technologies 1 Active
US7998318B2 Crosslinkable fill compositions for uniformly protecting via and contact holes Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.