Permanent magnet force rebalance micro accelerometer
US5060039A · kind A · utility
36Cited by
3References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 22, 1989 |
| Grant date | Oct 22, 1991 |
| Priority date | — |
| Expiry date | Feb 22, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/125
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An accelerometer fabricated by micromachining techniques from a crystaline precursor. The accelerometer is formed in a body of a semiconductor crystal such as silicon by doping portions to an etch resistant condition and etching a cavity around them to release a resiliently suspended multi legged member. A conductor is formed in one of the legs. A permanent magnet is placed with opposite polarity poles on either side of the leg and the acceleration displacement of the member sensed from which a current is developed through the leg conductor to restore the member position and provide an output indication of acceleration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.