Inventor · Wayland, MA, US

Paul Greiff

45Patents
24h-index
32Co-inventors
85Inventor score

Filing activity: Apr 12, 1976 → Aug 11, 2017

Most-cited inventions

PatentTitleAreaCited byStatus
US5216490A Bridge electrodes for microelectromechanical devices Physics 197 Expired
US5016072A Semiconductor chip gyroscopic transducer Physics 157 Expired
US5126812A Monolithic micromechanical accelerometer Physics 106 Expired
US5650568A Gimballed vibrating wheel gyroscope having strain relief features Performing Operations; Transporting 82 Expired
US5635639A Micromechanical tuning fork angular rate sensor Physics 66 Expired
US5111693A Motion restraints for micromechanical devices Performing Operations; Transporting 53 Expired
US5408877A Micromechanical gyroscopic transducer with improved drive and sense capabilities Physics 53 Expired
US5817942A Capacitive in-plane accelerometer Physics 52 Expired
US5195371A Semiconductor chip transducer Physics 47 Expired
US5535902A Gimballed vibrating wheel gyroscope Performing Operations; Transporting 41 Expired
US6230567A Low thermal strain flexure support for a micromechanical device Physics 40 Expired
US5969250A Micromechanical accelerometer having a peripherally suspended proof mass Physics 40 Expired
US5581035A Micromechanical sensor with a guard band electrode Physics 39 Expired
US5725729A Process for micromechanical fabrication Physics 37 Expired
US5060039A Permanent magnet force rebalance micro accelerometer Physics 36 Expired
US5515724A Micromechanical gyroscopic transducer with improved drive and sense capabilities Physics 35 Expired
US5760305A Monolithic micromechanical vibrating beam accelerometer with trimmable resonant frequency Physics 31 Expired
US5129983A Method of fabrication of large area micromechanical devices Performing Operations; Transporting 31 Expired
US5646348A Micromechanical sensor with a guard band electrode and fabrication technique therefor Physics 31 Expired
US5796001A Monolithic micromechanical tuning fork angular rate sensor Physics 30 Expired
US5555765A Gimballed vibrating wheel gyroscope Performing Operations; Transporting 28 Expired
US5144184A Micromechanical device with a trimmable resonant frequency structure and method of trimming same Electricity 28 Expired
US5605598A Monolithic micromechanical vibrating beam accelerometer with trimmable resonant frequency Physics 27 Expired
US5331852A Electromagnetic rebalanced micromechanical transducer Physics 27 Expired
US5507911A Monolithic micromechanical vibrating string accelerometer with trimmable resonant frequency Emerging Cross-Sectional Technologies 24 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.