Particulate inspection of fluids using interferometric light measurements
US5061070A · kind A · utility
21Cited by
7References
42Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 22, 1988 |
| Grant date | Oct 29, 1991 |
| Priority date | — |
| Expiry date | Apr 22, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2015/0238
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus for monitoring process fluids used in the manufacture of semiconductor components and other microelectronic devices relies upon detection of the phase shift of a pair of optical energy beams encountering a bubble or particle in the fluid. The system distinguishes between bubbles and particles having indices of refraction greater than the surrounding fluid and between different types and sizes of particles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.