Vacuum treatment apparatus and vacuum treatment method
US5061356A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 27, 1990 |
| Grant date | Oct 29, 1991 |
| Priority date | — |
| Expiry date | Feb 27, 2010 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/568
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A vacuum treatment apparatus includes a vacuum chamber having a first treatment position and at least one second treatment position where a substrate supported on a substrate stage subjected to a vacuum treatment. A drive device is operatively connected to a holding device to drive the same so that the holding device can move the substrate stage between the first and second treatment positions. The drive device is also operable to drive the holding device so that the holding device can rotate the substrate stage about the axis thereof at the first treatment position. A rotating device is provided for rotating the substrate stage about the axis thereof when the substrate stage is disposed at the second treatment position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.