Intelligent mass flow controller
US5062446A · kind A · utility
169Cited by
4References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 7, 1991 |
| Grant date | Nov 5, 1991 |
| Priority date | — |
| Expiry date | Jan 7, 2011 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7761
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
An intelligent mass flow controller for controlling the mass flow of gas to a semiconductor processing chamber. A sensing circuit measures a difference in temperature across a sensing tube and translates this difference to adjust a valve for controlling the mass flow. A microcontroller which includes a CPU, signal processing and software routines continually monitors the various parameters and provide "on the fly" corrections, as well as providing diagnostics and record retention.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.