Semiconductor transducer or actuator utilizing corrugated supports
US5064165A · kind A · utility
71Cited by
14References
10Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 7, 1989 |
| Grant date | Nov 12, 1991 |
| Priority date | — |
| Expiry date | Apr 7, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0073
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A semiconductor transducer or actuator is disclosed. The transducer and actuator each include a deflecting member with corrugations producing increased vertical travel which is a linear function of applied force. An accurate and easily controlled method that is insensitive to front-to-back alignment is also disclosed for forming uniform corrugations of precise thickness; independent of the thickness of the deflecting member. The cross-sectional shape of the corregations is not limited by the etching technique, so that any configuration thereof is enabled.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.