Patent assignee · US · COMPANY

IC Sensors, Inc.

17Patents
0Active
17Granted
35Portfolio score

Filing activity: Apr 7, 1989 → Jun 27, 1996

Most-cited patents

PatentTitleAreaCited byStatus
US5069419A Semiconductor microactuator Mechanical Engineering; Lighting; Heating 164 Expired
US5824204A Micromachined capillary electrophoresis device Performing Operations; Transporting 105 Expired
US5177579A Semiconductor transducer or actuator utilizing corrugated supports Physics 87 Expired
US5064165A Semiconductor transducer or actuator utilizing corrugated supports Physics 71 Expired
US5533412A Pulsed thermal flow sensor system Physics 69 Expired
US5209118A Semiconductor transducer or actuator utilizing corrugated supports Physics 66 Expired
US5103667A Self-testable micro-accelerometer and method Physics 59 Expired
US5116457A Semiconductor transducer or actuator utilizing corrugated supports Emerging Cross-Sectional Technologies 49 Expired
US5503016A Vertically mounted accelerometer chip Electricity 48 Expired
US5271597A Bimetallic diaphragm with split hinge for microactuator Mechanical Engineering; Lighting; Heating 44 Expired
US5184515A Single diaphragm transducer with multiple sensing elements Physics 31 Expired
US5445006A Self-testable micro-accelerometer and method Physics 29 Expired
US5616863A Side surface mounted accelerometer assembly Electricity 23 Expired
US5253510A Self-testable micro-accelerometer Physics 21 Expired
US5058435A Single diaphragm transducer with multiple sensing elements Physics 21 Expired
US5338400A Micromachining process for making perfect exterior corner in an etchable substrate Electricity 14 Expired
US5328559A Groove width trimming Electricity 12 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.