Patent · US Expired

Illuminance distribution measuring system

US5067811A · kind A · utility

20Cited by
3References
32Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJun 25, 1990
Grant dateNov 26, 1991
Priority date
Expiry dateJun 25, 2010

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F7/70358
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An illuminance distribution measuring system which includes a two-dimensional (area) sensor array to be disposed on the surface being illuminated by a pulsed laser beam from a pulsed laser and a signal processor operable, in response to output signals of the sensor array, to detect the illuminance distribution on the surface being illuminated.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.