Chidane Ouchi
24Patents
6h-index
12Co-inventors
66Inventor score
Filing activity: Jun 25, 1990 → Nov 20, 2012
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8009797B2 | X-ray imaging apparatus, X-ray imaging method, and X-ray imaging program | Physics | 40 | Active |
| US9063055B2 | X-ray imaging apparatus | Physics | 32 | Active |
| US8559594B2 | Imaging apparatus and imaging method | Physics | 32 | Active |
| US5067811A | Illuminance distribution measuring system | Physics | 20 | Expired |
| US6322220A | Exposure apparatus and device manufacturing method using the same | Electricity | 11 | Expired |
| US6661522B2 | Interference system and semiconductor exposure apparatus having the same | Physics | 8 | Expired |
| US6774982B2 | Exposure apparatus and device manufacturing method using the same | Physics | 6 | Expired |
| US9046466B2 | X-ray imaging apparatus | Physics | 5 | Active |
| US6721056B1 | Surface shape measuring apparatus and method | Physics | 4 | Expired |
| US8995613B2 | X-ray imaging apparatus | Physics | 4 | Active |
| US7106452B2 | Measuring device and measuring method | Physics | 4 | Expired |
| US8340243B2 | X-ray imaging apparatus, X-ray imaging method, and X-ray imaging program | Physics | 3 | Active |
| US7253907B2 | Measuring method and apparatus using shearing interferometry, exposure method and apparatus using the same, and device manufacturing method | Physics | 3 | Expired |
| US9066704B2 | X-ray imaging apparatus | Physics | 3 | Active |
| US9107637B2 | X-ray imaging apparatus and wavefront measuring apparatus | Physics | 3 | Active |
| US8004691B2 | Measuring apparatus, exposure apparatus and method, and device manufacturing method | Physics | 2 | Active |
| US8537966B2 | X-ray imaging apparatus, X-ray imaging method, and X-ray imaging program | Physics | 2 | Active |
| US9043182B2 | Absolute position measurement apparatus and method | Physics | 2 | Active |
| US7952726B2 | Measurement apparatus, exposure apparatus having the same, and device manufacturing method | Physics | 2 | Active |
| US8520217B2 | Talbot interferometer, its adjustment method, and measurement method | Physics | 2 | Active |
| US6853442B2 | Projection exposure apparatus and device manufacturing method that change a resonator length of a continuous emission excimer laser | Physics | 1 | Expired |
| US8077391B2 | Wavefront aberration measuring method, mask, wavefront aberration measuring device, exposure apparatus, and device manufacturing method | Physics | 0 | Active |
| US8351050B2 | Wavefront-aberration-measuring device and exposure apparatus | Physics | 0 | Active |
| US6961132B2 | Interference system and semiconductor exposure apparatus having the same | Physics | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.