Inventor · Utsunomiya, JP

Chidane Ouchi

24Patents
6h-index
12Co-inventors
66Inventor score

Filing activity: Jun 25, 1990 → Nov 20, 2012

Most-cited inventions

PatentTitleAreaCited byStatus
US8009797B2 X-ray imaging apparatus, X-ray imaging method, and X-ray imaging program Physics 40 Active
US9063055B2 X-ray imaging apparatus Physics 32 Active
US8559594B2 Imaging apparatus and imaging method Physics 32 Active
US5067811A Illuminance distribution measuring system Physics 20 Expired
US6322220A Exposure apparatus and device manufacturing method using the same Electricity 11 Expired
US6661522B2 Interference system and semiconductor exposure apparatus having the same Physics 8 Expired
US6774982B2 Exposure apparatus and device manufacturing method using the same Physics 6 Expired
US9046466B2 X-ray imaging apparatus Physics 5 Active
US6721056B1 Surface shape measuring apparatus and method Physics 4 Expired
US8995613B2 X-ray imaging apparatus Physics 4 Active
US7106452B2 Measuring device and measuring method Physics 4 Expired
US8340243B2 X-ray imaging apparatus, X-ray imaging method, and X-ray imaging program Physics 3 Active
US7253907B2 Measuring method and apparatus using shearing interferometry, exposure method and apparatus using the same, and device manufacturing method Physics 3 Expired
US9066704B2 X-ray imaging apparatus Physics 3 Active
US9107637B2 X-ray imaging apparatus and wavefront measuring apparatus Physics 3 Active
US8004691B2 Measuring apparatus, exposure apparatus and method, and device manufacturing method Physics 2 Active
US8537966B2 X-ray imaging apparatus, X-ray imaging method, and X-ray imaging program Physics 2 Active
US9043182B2 Absolute position measurement apparatus and method Physics 2 Active
US7952726B2 Measurement apparatus, exposure apparatus having the same, and device manufacturing method Physics 2 Active
US8520217B2 Talbot interferometer, its adjustment method, and measurement method Physics 2 Active
US6853442B2 Projection exposure apparatus and device manufacturing method that change a resonator length of a continuous emission excimer laser Physics 1 Expired
US8077391B2 Wavefront aberration measuring method, mask, wavefront aberration measuring device, exposure apparatus, and device manufacturing method Physics 0 Active
US8351050B2 Wavefront-aberration-measuring device and exposure apparatus Physics 0 Active
US6961132B2 Interference system and semiconductor exposure apparatus having the same Physics 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.