Semiconductor microactuator
US5069419A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jun 23, 1989 |
| Grant date | Dec 3, 1991 |
| Priority date | — |
| Expiry date | Jun 23, 2009 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K2099/008
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A semiconductor microactuator has a silicon semiconductor substrate having suspension means connected thereto. The suspension means has a first layer of material having a first thermal expansion coefficient and a second layer of material having a second thermal expansion different than the first thermal expansion coefficient and may be a part of a diaphragm or a pair of connecting members. A movable element, which may be a second part of the diaphragm or a boss, is connected to the suspension to be displaced thereby as the temperature of the first and second layers of material is varied. The displacement is solely irrotational with respect to the semiconductor substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.