Patent · US Expired

Method for the evaporation of monomers that are liquid at room temperature

US5069930A · kind A · utility

20Cited by

2References

6Claims

0Family size

Assignee

Leybold GmBH · DE

Inventors

Ingo Hussla · Hanau, DE
Jochen Ritter · Laubach, DE

Key dates

Filing date	Mar 29, 1990
Grant date	Dec 3, 1991
Priority date	—
Expiry date	Mar 29, 2010

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C16/4485
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

Monomers containing silicon and oxygen which are liquid at room temperature and have a low vapor pressure are fed in a liquid state via a mass flow regulator to an evaporator provided with a body having capillary action where the liquid is evaporated by radiant heat. Evaporated monomer is fed to the reaction zone of a vacuum chamber where thin coatings are applied on substrates by chemical vapor deposition.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.