Means and methods of lifting and relocating an epitaxial device layer
US5073230A · kind A · utility
137Cited by
2References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 17, 1990 |
| Grant date | Dec 17, 1991 |
| Priority date | — |
| Expiry date | Apr 17, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S117/915
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Means and methods for obtaining the separation of large area semiconductor pitaxial device layers from the substrates on which they are grown, the transfer of the grown epi layers to a new host substrate for mounted alignment with features of the new host, and reuse of the original substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.