Modular vapor processor system
US5076205A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 6, 1989 |
| Grant date | Dec 31, 1991 |
| Priority date | — |
| Expiry date | Jan 6, 2009 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A system for multichamber processing of semiconductor wafers providing flexibility in the nature of processing available in a multi processing facility. To accommodate changing processing demands and chamber replacement, a mobile processing chamber selectively docks with a multiple chamber system to form one of its processing chambers. The capabilities of the multiprocessing multichamber system are enhanced by extending the system to other multichamber systems through intermediate buffer storage wafer cassette and elevator systems. The extending multichamber system is further provided with intermediate access wafer storage elevator cassettes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.