E. John Vowles
11Patents
8h-index
7Co-inventors
61Inventor score
Filing activity: Oct 24, 1986 → Apr 25, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5076205A | Modular vapor processor system | Emerging Cross-Sectional Technologies | 194 | Expired |
| US4715921A | Quad processor | Emerging Cross-Sectional Technologies | 116 | Expired |
| US5013400A | Dry etch process for forming champagne profiles, and dry etch apparatus | Electricity | 65 | Expired |
| US5344542A | Multiple-processing and contamination-free plasma etching system | Emerging Cross-Sectional Technologies | 51 | Expired |
| US5308431A | System providing multiple processing of substrates | Electricity | 40 | Expired |
| US5013385A | Quad processor | Emerging Cross-Sectional Technologies | 38 | Expired |
| US6103055A | System for processing substrates | Electricity | 24 | Expired |
| US5102495A | Method providing multiple-processing of substrates | Electricity | 20 | Expired |
| US6214119A | Vacuum substrate processing system having multiple processing chambers and a central load/unload chamber | Emerging Cross-Sectional Technologies | 7 | Expired |
| US6776846B2 | Integrated processing system having multiple reactors connected to a central chamber | Emerging Cross-Sectional Technologies | 2 | Expired |
| US6413320B2 | Integrated processing system having multiple reactors connected to a central chamber | Emerging Cross-Sectional Technologies | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.