Method of operating a scanning probe microscope to improve drift characteristics
US5081390A · kind A · utility
50Cited by
4References
13Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 13, 1990 |
| Grant date | Jan 14, 1992 |
| Priority date | — |
| Expiry date | Aug 13, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/851
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention is a method for operating a Scanning Probe Microscope (SPM) to provide the capability to eliminate the scanner drift that occurs after the scan area is offset within the range of the scanner. The method disclosed comprises applying an offset that is larger than the desired one and then reducing the offset back to the desired value for scanning. The technique has been found to produce good results for both large and small scans.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.