Thin film resistor and method for producing same
US5081439A · kind A · utility
22Cited by
1References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 16, 1990 |
| Grant date | Jan 14, 1992 |
| Priority date | — |
| Expiry date | Nov 16, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49099
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A planar film resistor is trimmable by a laser beam. A pair of electrodes are spaced apart on a substrate and make contact with a film of resistive material disposed therebetween. The resistive material includes a laser produced trim region disposed internally to all boundaries of the resistive material, and extends through the thickness of said film. The trim region has an elongated dimension which is orthogonal to the most direct current path between the electrodes. In a preferred embodiment, the resistive material is covered by a passivating layer and is trimmed after the passivating layer is in place.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.