Object handling device
US5083896A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 13, 1989 |
| Grant date | Jan 28, 1992 |
| Priority date | — |
| Expiry date | Sep 13, 2009 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/20207
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
An object handling device successively transfers objects such as semiconductor wafers. The object handling device includes first and second collapsible arm units having hands for holding objects, a first drive shaft for selectively extending and contracting the first arm unit, a second drive shaft for selectively extending and contracting the second arm unit, a third drive shaft for turning the first and second arm units while keeping the first and second arm units in a relative positional relationship, the first, second, and third drive shafts being disposed coaxially with each other, and an actuator mechanism for angularly moving the first, second, and third drive shafts about their own axes independently of each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.