Akira Uehara
35Patents
17h-index
34Co-inventors
81Inventor score
Filing activity: Jun 16, 1978 → Oct 20, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5584647A | Object handling devices | Emerging Cross-Sectional Technologies | 101 | Expired |
| US4318767A | Apparatus for the treatment of semiconductor wafers by plasma reaction | Emerging Cross-Sectional Technologies | 100 | Expired |
| US4790262A | Thin-film coating apparatus | Emerging Cross-Sectional Technologies | 85 | Expired |
| US5131524A | Conveyor system with movable partitions | Performing Operations; Transporting | 77 | Expired |
| US5006220A | Electrode for use in the treatment of an object in a plasma | Emerging Cross-Sectional Technologies | 71 | Expired |
| US4208159A | Apparatus for the treatment of a wafer by plasma reaction | Emerging Cross-Sectional Technologies | 57 | Expired |
| US5083896A | Object handling device | Emerging Cross-Sectional Technologies | 53 | Expired |
| US5022979A | Electrode for use in the treatment of an object in a plasma | Emerging Cross-Sectional Technologies | 50 | Expired |
| US4550239A | Automatic plasma processing device and heat treatment device | Emerging Cross-Sectional Technologies | 43 | Expired |
| US4336438A | Apparatus for automatic semi-batch sheet treatment of semiconductor wafers by plasma reaction | Electricity | 41 | Expired |
| US4245154A | Apparatus for treatment with gas plasma | Electricity | 41 | Expired |
| US4483651A | Automatic apparatus for continuous treatment of leaf materials with gas plasma | Emerging Cross-Sectional Technologies | 32 | Expired |
| US4550242A | Automatic plasma processing device and heat treatment device for batch treatment of workpieces | Emerging Cross-Sectional Technologies | 29 | Expired |
| US5364488A | Coaxial plasma processing apparatus | Emerging Cross-Sectional Technologies | 27 | Expired |
| US4149923A | Apparatus for the treatment of wafer materials by plasma reaction | Electricity | 23 | Expired |
| US5137144A | Conveyor system | Performing Operations; Transporting | 22 | Expired |
| US4894254A | Method of forming silicone film | Electricity | 18 | Expired |
| US4880318A | Slidable vibration-isolating rubber member | Emerging Cross-Sectional Technologies | 16 | Expired |
| US4577165A | High-frequency oscillator with power amplifier and automatic power control | Electricity | 16 | Expired |
| US4749436A | Equipment for thermal stabilization process of photoresist pattern on semiconductor wafer | Emerging Cross-Sectional Technologies | 15 | Expired |
| US4578559A | Plasma etching method | Emerging Cross-Sectional Technologies | 13 | Expired |
| USD333544S | Conveyor belt | General | 12 | Expired |
| USD291413S | Wafer holding frame | General | 11 | Expired |
| US4868096A | Surface treatment of silicone-based coating films | Physics | 8 | Expired |
| US5344536A | Method of and apparatus for processing a workpiece in plasma | Electricity | 8 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.