Charged particle generating device and focusing lens therefor
US5095208A · kind A · utility
4Cited by
6References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 20, 1989 |
| Grant date | Mar 10, 1992 |
| Priority date | — |
| Expiry date | Jun 20, 2009 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/1215
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A charged particle generating device such as an ion implanter, a secondary ion mass spectrometer having a good mounting operability, a simple construction, good characteristics such as sensitivity, etc., owing to the fact that there is disposed a focusing electrode composed of the cylindrical electrodes disposed coaxially with each other, at least the inner electrode thereof having a plurality of openings.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.