Patent · US Expired

Wafer arm handler mechanism

US5096364A · kind A · utility

35Cited by

18References

5Claims

0Family size

Assignee

Varian, Inc. · US

Inventors

Mark G. Messer · Los Gatos, US
Lawrence R. Stark · Berkeley, US

Key dates

Filing date	Oct 11, 1990
Grant date	Mar 17, 1992
Priority date	—
Expiry date	Oct 11, 2010

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/6779
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A wafer handler arm conveys a wafer from a horizontal orientation to a vertical orientation for wafer processing. The arm includes a wafer holding member which is rigidly attached to a first shaft. The first shaft is rotatable about its longitudinal axis and the first shaft is rotatable about a second axis perpendicular to the first axis.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.