Mark G. Messer
2Patents
2h-index
1Co-inventors
30Inventor score
Filing activity: Apr 28, 1986 → Oct 11, 1990
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4670126A | Sputter module for modular wafer processing system | Emerging Cross-Sectional Technologies | 414 | Expired |
| US5096364A | Wafer arm handler mechanism | Electricity | 35 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.