Ligand stabilized +1 metal beta-diketonate coordination complexes and their use in chemical vapor deposition of metal thin films
US5096737A · kind A · utility
51Cited by
10References
12Claims
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Key dates
| Filing date | Oct 24, 1990 |
| Grant date | Mar 17, 1992 |
| Priority date | — |
| Expiry date | Oct 24, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K3/4076
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
Chemical vapor deposition precursors for depositing copper, silver, rhodium and iridium metals on substrates comprise ligand stabilized +1 metal beta-diketonate coordination complexes of said metals. Uses of such precursors in CVD processes are also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.