Inventor · San Jose, CA, US

Carl E. Larson

19Patents
8h-index
30Co-inventors
72Inventor score

Filing activity: Feb 17, 1987 → Nov 4, 2015

Most-cited inventions

PatentTitleAreaCited byStatus
US5096737A Ligand stabilized +1 metal beta-diketonate coordination complexes and their use in chemical vapor deposition of metal thin films Electricity 51 Expired
US5220044A Ligand stabilized +1 metal beta-diketonate coordination complexes and their use in chemical vapor deposition of metal thin films Electricity 31 Expired
US6806026B2 Photoresist composition Emerging Cross-Sectional Technologies 29 Expired
US4760013A Sulfonium salt photoinitiators Emerging Cross-Sectional Technologies 14 Expired
US9255194B2 Methods and materials for depolymerizing polyesters Emerging Cross-Sectional Technologies 12 Active
US5407710A Laser interconnection of circuits on transparent substrate Physics 11 Expired
US9914816B2 Methods and materials for depolymerizing polyesters Emerging Cross-Sectional Technologies 10 Active
US4775608A Generation of capacitive servo patterns on magnetic storage disks Physics 8 Expired
US7014980B2 Photoresist composition Emerging Cross-Sectional Technologies 6 Expired
US7288362B2 Immersion topcoat materials with improved performance Emerging Cross-Sectional Technologies 4 Expired
US7585609B2 Bilayer film including an underlayer having vertical acid transport properties Physics 3 Active
US8945808B2 Self-topcoating resist for photolithography Physics 3 Active
US7767385B2 Method for lithography for optimizing process conditions Physics 3 Active
US7160665B2 Method for employing vertical acid transport for lithographic imaging applications Physics 2 Expired
US7135595B2 Photoresist composition Emerging Cross-Sectional Technologies 2 Expired
US7855045B2 Immersion topcoat materials with improved performance Emerging Cross-Sectional Technologies 1 Active
US8034532B2 High contact angle topcoat material and use thereof in lithography process Emerging Cross-Sectional Technologies 1 Active
US7354692B2 Photoresists for visible light imaging Emerging Cross-Sectional Technologies 0 Expired
US7807340B2 Photoresists for visible light imaging Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.