Wafer carrier holder for wafer carriers
US5100190A · kind A · utility
1Cited by
12References
1Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 20, 1989 |
| Grant date | Mar 31, 1992 |
| Priority date | — |
| Expiry date | Nov 20, 2009 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67326
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Low profile self-draining wafer carrier holder for gripping and carriage of semiconductor wafer carriers through robotically, automated or manual processing equipment. Opposing members extend horizontally from a central base with gripping fingers at outer extremities to grip wafer carriers for automatic processing. A handle member extends vertically from the central base member, and includes a handle member for accommodation by robotic end effectors. Beveled and angled surfaces in a preferred one-piece construction aid in accelerated fluid chemical runoff.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.