Submicron Systems, Inc.
10Patents
0Active
10Granted
32Portfolio score
Filing activity: Nov 20, 1989 → May 6, 1997
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5228206A | Cluster tool dry cleaning system | Mechanical Engineering; Lighting; Heating | 82 | Expired |
| US5234540A | Process for etching oxide films in a sealed photochemical reactor | Electricity | 73 | Expired |
| US5082518A | Sparger plate for ozone gas diffusion | Performing Operations; Transporting | 64 | Expired |
| US5247954A | Megasonic cleaning system | Performing Operations; Transporting | 63 | Expired |
| US5625249A | Megasonic cleaning system | Performing Operations; Transporting | 26 | Expired |
| US5437710A | Chemical processing system for maintaining concentration of semiconductor processing solution | Emerging Cross-Sectional Technologies | 7 | Expired |
| US5149158A | Wafer carrier holder for wafer carriers | Electricity | 5 | Expired |
| US5807408A | Industrial robot safety device that shuts down operation in reponse to variation in tension of a rope | Performing Operations; Transporting | 4 | Expired |
| US5454677A | High temperature ceramic nut | Emerging Cross-Sectional Technologies | 2 | Expired |
| US5100190A | Wafer carrier holder for wafer carriers | Electricity | 1 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.