Near-field scanning optical microscope using a fluorescent probe
US5105305A · kind A · utility
246Cited by
8References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 10, 1991 |
| Grant date | Apr 14, 1992 |
| Priority date | — |
| Expiry date | Jan 10, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A novel probe, useful for near-field optical scanning microscopy, is provided. The probe has a fine tip which includes fluorescent material. In one embodiment, the invention is an apparatus which includes such a probe, means for exciting and detecting fluorescence in the probe tip, means for positioning the probe tip near the surface of a sample, and means for displacing the probe tip relative to the sample. In a second embodiment, the invention is a manufacturing method in which the novel probe is used to measure a characteristic dimension of a patterned workpiece.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.