Contrast enhancement layer compositions, alkylnitrones, and use
US5106723A · kind A · utility
67Cited by
3References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 8, 1991 |
| Grant date | Apr 21, 1992 |
| Priority date | — |
| Expiry date | Jan 8, 2011 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/129
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Contrast enhancement compositions are provided which can be used to make contrast enhancement layer photoresist composites. The composites can be used to make patterned photoresists under mid-UV light and utilize photobleachable alkylnitrones.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.