Motion restraints for micromechanical devices
US5111693A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jul 30, 1990 |
| Grant date | May 12, 1992 |
| Priority date | — |
| Expiry date | Jul 30, 2010 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/0235
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Motion restraints and a method for their fabrication are provided for use with a micromechanical transducer, such as a gyroscope or an accelerometer, to limit the motion of resiliently supported transducer elements, preventing extreme lateral or rotational displacement of the elements. The motion restraints are fabricated of a material such as gold that prevents or reduces the sticking of the transducer elements at points of contact between them. In one embodiment, the motion restraints include cantilevered depositions that extend from the substrate over the transducer element. In a further embodiment, the restraints includes a metal capped post and close-tolerance lateral restraints.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.