Semiconductor transducer or actuator utilizing corrugated supports
US5116457A · kind A · utility
49Cited by
4References
25Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 30, 1991 |
| Grant date | May 26, 1992 |
| Priority date | — |
| Expiry date | Aug 30, 2011 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49103
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A semiconductor transducer or acutator is disclosed. The transducer and actuator each include a deflecting member with corrugations producing increased vertical travel which is a linear function of applied force. An accurate and easily controlled method that is insensitive to front-to-back alignment is also disclosed for forming uniform corrugations of precise thickness; independent of the thickness of the deflecting member. The cross-sectional shape of the corrugations is not limited by the etching technique, so that any configuation thereof is enabled.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.