Method and apparatus for measuring optical constants of a thin film as well as method and apparatus for fabricating a thin film utilizing same
US5125740A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 15, 1990 |
| Grant date | Jun 30, 1992 |
| Priority date | — |
| Expiry date | Feb 15, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/4126
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sample is located so as to be close to a prism and a light beam coming from a light source is projected to the prism while varying the incident angle to the prism as a parameter. The incident light beam to the prism is propagated therein and light emerging from the bottom surface of the prism, which is in contact with the sample, is projected to the sample. At the same time the intensity of light reflected by the bottom surface of the prism is measured. Optical constants such as the refractive index, the film thickness, the distribution of the refractive index, etc. are obtained by calculation, starting from measured values thus obtained.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.