Diamond-on-a-substrate for electronic applications
US5126206A · kind A · utility
63Cited by
7References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 6, 1990 |
| Grant date | Jun 30, 1992 |
| Priority date | — |
| Expiry date | Sep 6, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31678
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A coated substrate product is disclosed which comprises a substrate and a polycrystalline diamond layer having a smooth surface finish, enhanced crystal orientation in comparison to industrial grade diamond powder particularly in the (220) and (400) directions, and excellent electrical and thermal properties. Also disclosed is a method for fabricating such a coated substrate in which the polycrystalline diamond layer is chemically vapor deposited onto the substrate at substrate temperatures in the range of 650.degree. to 825.degree. C.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.