Integrated optical precision measuring device
US5127733A · kind A · utility
10Cited by
9References
19Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 25, 1990 |
| Grant date | Jul 7, 1992 |
| Priority date | — |
| Expiry date | May 25, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/34
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A photoelectric measuring device for measuring the relative position between two objects utilizing interfering lightwave patterns is provided. Two diffraction gratings having an equal grid constants are provided to perpendicularly impinge beam bundles into circular coupling-in gratings of the integrated optical circuit. In addition, an integrated light source may be coupled-out of the integrated optical circuit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.