Photoresist composition with copolymer binder having a major proportion of phenolic units and a minor proportion of non-aromatic cyclic alcoholic units
US5128232A · kind A · utility
58Cited by
7References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 22, 1989 |
| Grant date | Jul 7, 1992 |
| Priority date | — |
| Expiry date | May 22, 2009 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/11
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A photoresist that utilizes a copolymer of a phenol and a cyclic alcohol having increased optical transmission properties relative to photoresists using fully aromatic phenolic resins. Preferred binders are hydrogenated novolak resins and hydrogenated polyvinyl phenol resins.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.